6 777J Design And Fabrication Of Microelectromechanical Devices Spring 2007

Microelectromechanical Systems (MEMS) power the modern world, from the accelerometers in our smartphones to advanced medical diagnostics. Understanding how to design and build these microscopic sensors and actuators requires a unique blend of materials science, electrical engineering, and physics. This text-based course guides you through the fundamental principles of microsystem engineering, making complex microscale phenomena accessible and practical for beginners. By working through this course, you will transition from understanding basic physical properties to modeling and designing complete microscale systems. You will gain a solid grasp of how microscopic devices are fabricated and how to simulate their behavior under real-world conditions. What you'll learn: - Understand the core physical principles, material properties, and scaling laws that govern MEMS devices - Learn key microfabrication techniques including photolithography, etching, deposition, and surface micromachining - Analyze the structural behavior, mechanical properties, and fluid dynamics of microscale components - Explore common sensing and actuation mechanisms such as electrostatic, piezoelectric, and thermal systems - Master the fundamentals of signal conditioning, noise reduction, and feedback loops in microsystems - Apply modeling and simulation concepts to design inertial sensors, optical MEMS, and bioMEMS to meet performance specifications This course begins with essential terminology and the foundational physics of the microscale, ensuring you have a strong baseline before moving into fabrication processes. You will then progress through detailed design methodologies, structural analysis, and simulation strategies to help you conceptualize viable devices. This course is designed for engineering students, hobbyists, and professionals new to nanotechnology and micro-engineering. No prior cleanroom or fabrication experience is required to follow these lessons. Start your journey into the micro-world and master the essentials of MEMS design today.